发明名称 |
SENSING PROBE FOR DETERMINING LOCATION OF CONDUCTIVE SPOTS |
摘要 |
A sensing apparatus for determining the precise location of a conductive feature on an insulating substrate which has a base, a plurality of flexible flat elongated contact blade elements having end portions for contacting and establishing electrical contact to a conductive surface feature, insulating means between the blade elements, and a base member for supporting the blade elements in a bowed condition with the end portions arranged in a plane parallel to the plane of the top surface of the insulating substrate. |
申请公布号 |
DE2960084(D1) |
申请公布日期 |
1981.03.12 |
申请号 |
DE19792960084 |
申请日期 |
1979.04.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FAURE, LOUIS HENRY;HODGE, PHILO BURTON |
分类号 |
H01L21/68;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/07;G05D3/20 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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