| 摘要 |
PURPOSE:To obtain easily a solid thin film having a perfect composition and structure by a method wherein positive ions and negative ions are alternately radiated repetitively to the surface of a substrate being electrically insulated from the circumference putting radiation stop times between them, and ions are made to adhere intermittently to the surface of the substrate to form a solid film. CONSTITUTION:An ion generator 1a and a substrate 2 being fitted up to a substrate holder 3 are made to confront putting a gap between them, and the path of ions locating betwen them is surrounded with ion collecting plates 4 connected to a switch 5. Constituting a device in this way, ionized particles of element A being charged in positive and are generated from the generator 1a are made to be arranged being distributed on the surface of the substrate 2 insulated electrically from the circumference, and when the saturation condition is attained and the growth of ion film is stopped, the collecting plates are earthed or are made to be a reverse potential to eliminate remained ions in the middle space. Then ionized particles of element B being charged in negative and are generated from a generator 1b being put side by side at the neighborhood of the generator 1a are radiated, and are put upon the previously formed ion film. |
