Infrared interference type film thickness measuring method and instrument therefor

摘要

An infrared light is applied to a polymer film having a thickness of less than 30 mu , and the infrared light is spectroscopically separated before or after being applied to the polymer film to obtain an infrared interference fringe spectrum based on the polymer film, and then the extreme points of the infrared interference fringe spectrum are detected by processing, whereby to measure the thickness of the polymer film.