| 摘要 |
PURPOSE:To facilitate fine processing for obtaining a prescribed pattern, by using molybdenum nitride as a superconductive material when manufacturing a bridge- type Josephson element. CONSTITUTION:A bridge section formed by being covered with a molybdenum film 2 on a substrate 1 is covered with a mask 3 of a silicon dioxide film and receives nitriding treatment by being heated in a mixture gas of nitrogen and hydrogen to turn the exposed film into a molybdenum nitride. And then, by using a mixture liquid of phosphoric acid, acetic acid, nitric acid and water which has an approximately 5-time faster etching speed to molybdenum nitride than to molybdenum, etching is executed to prepare a Josephson element of bridge type having a prescribed pattern. Since niobium or molybdenum nitride which is high in hardness and difficult for fine processing is used, workability becomes extremely high. |
