IMPROVEMENTS IN DEVICES FOR ETCHING SEMI-CONDUCTOR DISCS

摘要

1300333 Etching ROBERT BOSCH GmbH 31 March 1970 [27 March 1969] 15114/70 Heading B6J Semi-conductor discs 7 are etched while supported in the individual cells of an etching basket 5 arranged for rotation about an hori- zontal axis in etching liquid 8. The cells are bounded by dividing walls 6 and cross-bars 10 provided with grooves 11 which support the discs in an upright position as the basket is rotated.