发明名称 CRUCIBLE FOR SEMICONDUCTOR ART AND MANUFACTURE THEREOF
摘要 A crucible for semiconductor technology purposes, especially for the production of silicon crystals, comprising an outer layer portion or layer of silicon dioxide, especially an outer made from granular natural quartz, and an inner lining made from synthetic crystalline quartz is described. The inner lining has on its interior surface a thin amorphous layer suitably made by heating a synthetic quartz layer disposed over a granular natural quartz layer at a sufficient temperature for a sufficient period of time to convert at least a portion of the synthetic crystalline quartz to the amorphous state.
申请公布号 JPS5617996(A) 申请公布日期 1981.02.20
申请号 JP19800094098 申请日期 1980.07.11
申请人 HERAEUS SCHOTT QUARZSCHMELZE 发明人 HORUSUTO ARUBURETSUHITO
分类号 B28B1/34;B32B9/04;C03B19/09;C03B20/00;C30B15/10;C30B29/06;C30B35/00;H01L21/208 主分类号 B28B1/34
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