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发明名称
MANUFACTURE OF INTEGRATED CIRCUIT MASK
摘要
申请公布号
JPS5615034(A)
申请公布日期
1981.02.13
申请号
JP19790090298
申请日期
1979.07.18
申请人
OKI ELECTRIC IND CO LTD
发明人
NAKASHIMA HIROSHI
分类号
H01L27/04;H01L21/22;H01L21/331;H01L21/74;H01L21/822;H01L29/73
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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