| 摘要 |
PURPOSE:To perform coaxial lighting and polarized lighting dark field illumination simultaneously by the constitution wherein two light sources, two semitransparent mirrors and two reflecting mirrors are disposed to a casing provided to the leading end of a microscope. CONSTITUTION:Light from one light source 14 passes through a condenser lens 15, is reflected downward by a semitransparent mirror 16, is further reflected by the surface of a specimen 20, and advances in the direction of the optical axis 19' of one optical system of the microscope. Light from the other light source 14' advances in the direction of the optical axis 19 of the other optical system in the same manner, and this turns out that both perform coaxial lighting. The beams of light transmitted through the semitransparent mirrors 16, 16' from light sources 14, 14' are reflected respectively by reflecting mirrors 17, 17', and advance in the direction of the specimen 20, thereby providing polarized lighting dark field illumination. Hence, both of the specimen surface 20 and a pincette are observed during pincette work such as in chip treatment and assembling processes of semiconductor devices. |
