| 摘要 |
PURPOSE:To enable a noncontacting measurement of convex shape easily, by measuring the spot on a screen of laser beam reflected on a convex surface to be measured every two times through a slight shift of the screen at every beam position. CONSTITUTION:An object having a convex surface to be measured is fixed, and a direction passing through the most convexed part and vertical to the contact plane is taken as the X axis and an axis vertical to the X axis and within a profile plane is taken as the Y axis. Then, the laser beam in parallel with the Y axis is reflected on the convex plane and a spot position produced on a screen placed vertical to the X axis is measured twice by shifting the screen position slightly. Thus, the X and Y axes where the reflection on the convex plane is made, are obtained. For example, a laser beam 40 is reflected on a convex plane 1A and q or q' is produced on the screen, then the coordinates of P are obtained as X1=L0 (1-L2/L1) and Y1=L0-l, allowing to make noncontacting measurement of a convex plane easily. |
