| 摘要 |
PURPOSE:To make accurate the rotary positioning of patterns, by irradiating a testing line, detecting the posture of the testing line by a line sensor, arithmetically processing this detected signal, thus obtaining the control signal for a rotary table. CONSTITUTION:The rotary table 2 is allowed to rotate around a rotation supporting point 16 by a motor 17. The light from an illuminating lamp 21 passes through a lens 20, mirrors and condensor lenses 13, comes into the line sensor 14 provided above stages 3 from under the testing line 12 provided on a substrate 1, and then takes a picture of the testing line. This signal is inputted into an arithmetic processing unit 15 through a line sensor control unit 23, calculates the deviation amount of rotation by the testing line, provides the motor 17 of the rotary table 2 with motor control signal through the motor control unit 24, and then moves the table to an accurate position. |
