| 摘要 |
PURPOSE:To attempt the reduction of spaces between electrodes of a semiconductor chip to be measured to reduce the chip area by a method wherein the part of a probe-card except the probe-tips are insulated. CONSTITUTION:Probes 3 previously covered with an insulator 8 are fixed in the positions in accordance with that of electrodes 7 of a chip 6 to be measured. When this probe-card is used, as each probe is completely insulated except tip, the short- circuiting between the neighboring probes does not take place although the card is used consecutively for a long time. Therefore the spaces between the probes can be reduced to reduce the tip area. |
