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发明名称
DEVICE FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPH10149997(A)
申请公布日期
1998.06.02
申请号
JP19960307751
申请日期
1996.11.19
申请人
SHARP CORP
发明人
HASHIMOTO TAKAHIRO
分类号
C30B19/06;H01L21/208;(IPC1-7):H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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