DEVICE FOR MEASURING AND CONTROLLING GAS FLOWS

摘要

The device comprises two deformable housings, the first housing (1) being connected with a pressure source (P) and the second housing (2) being connected to a source of the same pressure through a flow limiter (6) and to the atmosphere through a system (9) of which the flow is to be measured or control. Between the second housing (2) and the system (9) a valve (8) is provided. Application to measuring very small gas flows.