| 摘要 |
PURPOSE:To readily obtain the optical fiber array of high accuracy by forming optical fiber through-holes in the specified substrate through photoetching thence inserting and securing the ends of optical fibers in these through-holes. CONSTITUTION:A film 2 and photoresist film 3 are formed to a substrate 1 composed of suitable material such as metals and the photoresist film 3 is patterned by exposure through a photomask 4, whereby openings 3A for etching are formed. These openings 3A are made of the same size as the outside diameter of optical fibers. Thence, with the photoresist film 3 as a mask, the film 2 is etched to form openings 2A. Thence, the photoresist film 3 is removed, after which with the film 2 as a mask, the substrate 1 is etched to form openings 1A. After the film 2 is removed, the ends of optical fibers 5 are inserted into the openings 1A of the substrate 1 and are secured by applying adhesive agents 6 such as resins or glass. |
