发明名称 Monolithic HVMOSFET array.
摘要 <p>Integrated monolithic arrays of high voltage metal oxide semiconductor field effect transistor (10) having closed geometry and grounded peripheries for interdevice isolation, are able to function as drivers that may be switched on and off. The HVMOSFET's include DMOS-like structures with separate channel and drift regions, closed geometry configurations with centre drains (40) and split oxide topography (50, 55), having relatively thick oxide under a field plate and over a drift region for surface depletion and high voltage field inversion preclusion respectfully. The HVMOSFET includes an active load operatively connected in cascade and connecting to a device switch for forming an integrated HV Active Switch in a monolithic array.</p>
申请公布号 EP0020164(A1) 申请公布日期 1980.12.10
申请号 EP19800301808 申请日期 1980.05.30
申请人 XEROX CORPORATION 发明人 RONEN, RAM S.
分类号 H01L29/06;H01L29/10;H01L29/40;H01L29/43;H01L29/78;(IPC1-7):01L29/60;01L29/62;01L29/78 主分类号 H01L29/06
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