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发明名称
ION SOURCE
摘要
申请公布号
JPH11154472(A)
申请公布日期
1999.06.08
申请号
JP19970336337
申请日期
1997.11.19
申请人
NISSIN ELECTRIC CO LTD
发明人
SAKAI SHIGEKI;TAKAHASHI MASATO
分类号
H01J27/02;H01J27/16;H01J37/08;(IPC1-7):H01J27/02
主分类号
H01J27/02
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代理人
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