发明名称 EXHAUST TRAP AND TREATING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To make the clogging of an exhaust trap hardly generable and to make increasable the collecting efficiency of solid substance. SOLUTION: This exhaust trap has six trap elements 61(1) to 61(6), a storing case 62, a cooling flange 63 and a fixing bolt 64, where the trap elements 61(1) to 61(6) have functions of collecting reaction products. The storing case 62, the cooling flange 63 and the fixing bolt 64 have functions of holding the trap elements 61(1) to 61(6). The trap elements 61(a) (a=1, 2) 61(b) (b=3, 4), 61(5) and 61(6) have different collecting efficiency. They are arranged in such a manner that the collecting efficiency is made higher as it goes from the upstream side to the downstream side of the flow of the exhaust gas.</p>
申请公布号 JP2000045073(A) 申请公布日期 2000.02.15
申请号 JP19980214038 申请日期 1998.07.29
申请人 KOKUSAI ELECTRIC CO LTD;ULTLA CLEAN TECHNOLOGY KAIHATSU KENKYUSHO:KK 发明人 SHIBATA EIJI;NITTA TAKEHISA
分类号 B01D53/34;C23C16/44;H01L21/205;(IPC1-7):C23C16/44 主分类号 B01D53/34
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