| 摘要 |
PROBLEM TO BE SOLVED: To prevent scattering of dust (particle) into a clean room even if a multistage slide arm device consists of multiple stages by covering the openings of guide grooves with belts which serve also as movable belts. SOLUTION: Arm-like frames 2, 3 stacked one on top of the other are moved by belt moving means 5, 6 along guide grooves 10, 11 formed in individual frames 2, 3, and the belts 58, 65 of the belt moving means 5, 6 always cover approximately the overall lengths of the guide grooves 10, 11 during movement of the frames, whereby scattering of dust can be prevented.
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