| 摘要 |
PURPOSE:To eliminate the varience in various characteristics of the thin Hall element for greater stability thereof by evaporating the mixture of In and Sb on a substrate at a higher speed than that of the conventional vaporation, being placed on the evaporation source in such a manner that the Sb is slightly excessive in terms of mol ratio. CONSTITUTION:The mixture 4 of In and Sb is placed on a boat for heating specimen in a vacuum device and evaporated on the substrate 5 under vacuum at a speed of roughly 5,000-7,500Angstrom /min. At the same time, the substrate 5 is heated with the heater 6 up to 350-500 deg.C and maintained under this condition to have the InSb alloy evaporated on the substrate 5. This facilitates the combination between In and Sb in the thin film Hall element and eliminates the variance in various characteristics thereby stabilizing thereof. |
