| 摘要 |
An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.
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