发明名称 |
Semiconductor transducers employing flexure frames |
摘要 |
A pressure transducer employs a semiconductor diaphragm with a top surface having located thereon a central boss area of a trapezoidal cross section surrounded or "framed" by a continuous groove of a predetermined width. Piezoresistive sensors are formed on the bottom surface of said diaphragm with a first sensor adjacent the outer edge of said groove and another sensor parallel to said first sensor and adjacent the inner edge of said groove, said groove operative as a stress concentrating area to enable said sensors to provide a relatively large linear output upon application of a force to said diaphragm.
|
申请公布号 |
US4236137(A) |
申请公布日期 |
1980.11.25 |
申请号 |
US19790021960 |
申请日期 |
1979.03.19 |
申请人 |
KULITE SEMICONDUCTOR PRODUCTS, INC. |
发明人 |
KURTZ, ANTHONY D;MALLON, JOSEPH R;NUNN, TIMOTHY A |
分类号 |
G01L9/00;(IPC1-7):G01L1/22 |
主分类号 |
G01L9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|