INTEGRATED MICROELECTROMECHANICAL WAVELENGTH SELECTIVE SWITCH AND METHOD OF MAKING SAME

摘要

A fully integrated microelectromechanical (MEMS) IxK wavelength selective switch (WSS) includes an array of N solid-immersion micromirrors (SIMs) and a K+l dispersion waveguide arrays that are integrally fabricated together. In one embodiment, the WSS is fabricated in Silicon. In another embodiment, the N actuators of the SIMs are etched in the Silicon layer of a Silicon-on Insulator (SOI) wafer. Thereafter, a Silica layer is deposited on the Silicon layer and the K+l waveguide arrays and the mirrors for the N SIMs are etched in that Silica layer. In yet another embodiment, the K+l dispersion waveguide arrays, except for a small portion of the common confocal coupler, are fabricated using a material selected from a group including Silica, sol-gel, polymers, that is deposited on a first wafer selected from a group including Silicon, Saphire, or other glass insulator material and the remaining portion of the common confocal coupler and the N SIMs are fabricated in a Silicon wafer, and the first wafer and Silicon wafer are then butt-coupled together.