| 摘要 |
PURPOSE:To enable exchange of specimens to be conducted with high efficiency, by providing a specimen-introducing mechanism on side wall of vacuum container containing a specimen-transferring table, and also by providing a take-out mechanism on side wall which cross the specimen- introducing mechanism rectangularly. CONSTITUTION:Specimen are contained in cassette 5 and some pieces of which specimen are kept in magazine. Gate valve 10 is closed and air is introduced 11 to maintain inside pressure of room 3 at atmospheric pressure, level of elevator 7 is adjusted (or set) to No.1 cassette. The valve 10 is opened after preliminary exhaust, specimen table 2 is shifted to the exchanging position and the cassette is sent over to frame 13 on table 2 by rod 8. By extending bellows 14 with introduction of air, the cassette is fixed onto base surface of frame 13. The rod 8 is retracted to close the valve 10, and the table 2 is shifted to allow imaging to be conducted. Now, the table is shifted to the take-out position, the bellows is replaced to open valve 10', the cassette is taken out by rod 9 and cassette hole 5', the valve 10 is closed and this chamber is maintained at a constant vacuum by conducting exhaust 11 for execution of curing. A new specimen is introduced onto the table 2, and image depicting is executed in parallel with the curing. By conducting insertion and take-out in rectangular direction 2 in this manner, overall efficiency is largely improved. |
