| 摘要 |
PURPOSE:To prevent degradation in film forming efficiency by sputtering by adding gaseous nitrogen to gas at the time of forming an information recording medium having a recording film contg. carbon and hydrogen and metal, semimetal or semiconductor element by sputtering using a metal or semiconductor as a cathode in a specific atmosphere mixture. CONSTITUTION:The gaseous nitrogen 10 is added to the gas at the time of forming the information recording medium having the recording film 12 contg. the carbon and hydrogen and metal, semimetal or semiconductor element by sputtering using the metal, semimetal or semiconductor as the cathode 8 in the atmosphere of gaseous hydrocarbon 4 or mixture composed of the gaseous hydrocarbon 4 and rare gas 6. The species formed in the glow discharge state of the gaseous hydrocarbon and gaseous N2 are the chemical species of C-N and N-H systems and the carbon and reformed layers on the target react with the N radicals and H radicals generated in glow discharge to form the volatile gas contg. the carbon which is easily removable from the target. The materials to hinder sputtering are thereby prevented from depositing on the target and the degradation in the film forming efficiency by sputtering is obviated. |
