发明名称 ILLUMINATOR FORSUPPLYING LIGHT BEAM SCATTERED FROM PREDETERMINED FLAT REGION
摘要 An illuminator for supplying a divergent illuminating beam from an area of predetermined energy distribution and dimensions comprising a coherent source whose image is formed in a plane by imaging means incorporating electrically controlled optical scanning means making it possible to displace the image in the said area in accordance with a predetermined law.
申请公布号 JPS55143033(A) 申请公布日期 1980.11.08
申请号 JP19800053024 申请日期 1980.04.23
申请人 THOMSON CSF 发明人 JIYORUJIYU DOUBURUUKU;MISHIERU RAKONBA;MISHIEERU BURUBINIYON
分类号 H01L21/30;G02B19/00;G03F7/20;H01L21/027 主分类号 H01L21/30
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