| 摘要 |
<p>PURPOSE:To dispense with the rotation of a wafer cassette holding gripper and to contrive the lightening of the title robot and a reduction in dusts by a method wherein the wafer cassette holding pawl part is provided with a holding gripper for longitudinally placed cassettes and a holding gripper for laterally placed cassettes. CONSTITUTION:A hand part for holding cassettes 2 for semiconductor wafers 1 are provided with a gripper 14 (14a and 14b) for holding longitudinally placed cassettes and a gripper 15 (15a and 15b) for holding laterally placed cassettes. The grippers 14 and 15 are made to perform a switching operation by a switching mechanism part 8. The hand part is mounted to the point of a manipulator 6. As there is no need to rotate the hand part around a horizontal axis, a rotating mechanism part becomes unnecessary in the hand part, the hand part can be lightened and moreover, it is also eliminated that the hand part is rotated on the cassettes and dusts are generated. As a rotating mechanism part (is not shown in a diagram) for the cassette 2 is provided on a carrier, which is mounted to the manipulator, the longitudinal and lateral conversion of the cassettes 2 is also possible.</p> |
