| 摘要 |
PURPOSE:To made it possible to perform the exhausting operation effectively in a short time, and simplify the airtight structure of equipment, etc. by generat ing the super soft X-ray or the soft X-ray by the simple constitution and irradiat ing the subject. CONSTITUTION:The X-ray tube 4 radiates the X-ray of rather short wave length generated from the first target 3 outwards from the window 14. This X-ray (a) of short wave length excites the second target 5 to make it generate the soft X-ray or super soft X-ray (b) of wave length longer than 15Angstrom . This fluores cent X-ray (b) enters the mask B through the small hole 6 on the aperture plate 7. The transmitted X-ray corresponding with the pattern of the mask enters the resist 9 and produces the denaturation zone. As the soft X-ray or super soft X-ray (b) enters the resist 9 through the mask 8, the spread of the X-ray caused by diffraction, etc. is so small that the high resolution can be obtained, and the absorption by the resist increases, too. Moreover, as the X-ray tube radiates the X-ray of rather short wave length, the absorption by the window material in little, thereby the efficiency increases. |
