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经营范围
发明名称
DEVICE FOR SCANNING CHARGED PARTICLE BEAM
摘要
申请公布号
SU708944(A1)
申请公布日期
1980.10.23
申请号
SU19782611702
申请日期
1978.05.17
申请人
DMITRIEV S.P.,SU;IVANOV A.S.,SU;RAZIN G.I.,SU;SVININ M.P.,SU;FEDOTOV M.T.,SU
发明人
DMITRIEV S.P.,SU;IVANOV A.S.,SU;RAZIN G.I.,SU;SVININ M.P.,SU;FEDOTOV M.T.,SU
分类号
H05H5/00;(IPC1-7):H05H5/00
主分类号
H05H5/00
代理机构
代理人
主权项
地址
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