发明名称 VIBRATION MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vibration measurement device capable of optically measuring vibrations generated on a measurement target without requiring any complicated adjustment.SOLUTION: The vibration measurement device includes: a wave transmitting part for causing a measurement target to vibrate by means of acoustic waves which are output from a parametric speaker toward the measurement target; and an optical measurement part that irradiates the measurement target with a laser beam and receives a laser beam which is reflected on the measurement target to measure vibrations of the measurement target based on the received light. The wave transmitting part and the optical measurement part are integrally mounted with each other. The optical measurement part is arranged so that the central axis of the acoustic wave output from the parametric speaker coincides with the projection/reception optical axis of the laser beam with respect to the measurement target.SELECTED DRAWING: Figure 1
申请公布号 JP2016130683(A) 申请公布日期 2016.07.21
申请号 JP20150004958 申请日期 2015.01.14
申请人 TOSHIBA TEC CORP 发明人 ISHIKAWA DAISUKE;KOMIYA KENICHI
分类号 G01N29/12;G01N29/26;G01N29/34;G01N29/36 主分类号 G01N29/12
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