EXPOSURE METHOD, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a driving method of a spatial light modulator, capable of reducing errors from a target distribution of an intensity distribution of a space image formed on the surface of a substrate.SOLUTION: A driving method of a spatial light modulator includes: setting by a mirror element array a mirror element 30A in a first state that incident light becomes by a mirror element array to reflection light in which a phase is the same or only a first phase is different, and a mirror element 30B in a second state that incident light becomes reflection light in which a phase is different from the first phase by nearly 180°, in an alignment having a first phase distribution 50A; and setting by a mirror element array the first mirror element and the second mirror element in an alignment having a second phase distribution 50B made by inverting the first phase distribution.SELECTED DRAWING: Figure 6