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发明名称
SEMICONDUCTOR TEST UNIT
摘要
申请公布号
JPS55129771(A)
申请公布日期
1980.10.07
申请号
JP19790037503
申请日期
1979.03.29
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KAKIHARA KAZUHIRO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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