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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS55128842(A)
申请公布日期
1980.10.06
申请号
JP19790035568
申请日期
1979.03.28
申请人
HITACHI LTD
发明人
HORIUCHI JIYUNICHIROU;YAGI HIDEYUKI
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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