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发明名称
摘要
申请公布号
JPS55139556(U)
申请公布日期
1980.10.04
申请号
JP19790039775U
申请日期
1979.03.26
申请人
发明人
分类号
H01L21/52;H01L23/08;H01L23/48;(IPC1-7):H01L23/48;H01L29/46
主分类号
H01L21/52
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