| 摘要 |
PURPOSE: To eliminate a defect of a mechanical load which is caused by a warping and a compression stress preliminarily applied to a plate-like body by introducing a gas between a plate-like body and a rear plate as a cushion for improving the heat transmissivity. CONSTITUTION: A rear plate 1 is fixedly secured to a base plate 2 and a plate-like body 5 is disposed on the rear plate 1. In this occasion, due to the size of both material, a gap is formed between both of them. A cover 6 is mechanically pressed onto the base plate and the plate-like body 5 and the rear plate 1 are hermetically sealed against a surrounding area. A gas is simultaneously introduced through holes 3, 8 and the gas pressure is adjusted such that the pressure between the cover 6 and the plate-like body 5 is several times as high as the pressure between the rear plate 1 and the plate-like body. To this end, the conductance of a gas supply pipe against the front surface side of the plate-like body and a space between the rear side of the plate-like body and the rear plate is set such that a high pressure of 50 millibar is applied to the front surface of the plate-like body and a pressure force of 15 mm bar is applied as the gas cushion pressure. Due to such a construction, the plate-like body 5 comes into contact with the rear plate 1 in an optimum condition thus generating no mechanical load against the plate-like body 5. |
