GASEINLASSSYSTEM FUER DIE SCHICHTPRAEPARATION IN EINEM CVD-VERTIKALREAKTOR,申请号DD19790213239-传众专利搜索

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发明名称	GASEINLASSSYSTEM FUER DIE SCHICHTPRAEPARATION IN EINEM CVD-VERTIKALREAKTOR
摘要
申请公布号	DD144079(A1)	申请公布日期	1980.09.24
申请号	DD19790213239	申请日期	1979.05.30
申请人	EICHHORN,GERD,DD	发明人	EICHHORN,GERD,DD
分类号	C30B25/14;H01L21/205;H01L21/31;(IPC1-7):C30B25/14	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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