| 摘要 |
PURPOSE:To precisely detect the contact of an IC inspecting probe provided on a probe card with a semiconductor substrate by detecting the potential between the probe and the substrate. CONSTITUTION:Any probe 5 on a probe card 4 is connected to the terminal 7 of a semiconductor substrate detector 3, and a specimen base 2 carrying a semiconductor substrate 1 is connected to a terminal 6. A comprator 12 compares the standard potential generated by a generator 13 in the detector 3 with the potential of the probe as obtained from an input terminal set to detect the contact of the probe with the substrate 1. The existence of the contact may be detected by altering the detecting range of the resistance value between the probe and the substrate upon control of the standard potential by a controller 16 and freely selecting the resistance value in the range from high to low resistances. According to this method, it can extend the short life of the probe card due to the deformation of the probe and the like. |
