| 摘要 |
PURPOSE:To obtain the titled material for a membrane piezoelectric crystal with excellent axial orientation and uniformity of a surface of membrane by a method wherein ZnO is calcined and ground and, after molded and cut to a shape having a spherical surface portion, is sintered and solidified at a specific temp. CONSTITUTION:ZnO powder is heated at 700-1200 deg.C within air and calcined for about 2hrs. Subsequently, this powder is ground and dried and, after is added by a sticking agent and granulated to granules, molded by static water pressure and subjected to molding process by polishing and cutting work to obtain a molded article having a hollow spherical or semispherical surface and sintered at 750- 1400 deg.C in an air atmosphere for about 2hrs. and solidified. The obtained target material has relatively high specific resistance and the energy loss thereof during spattering is low because sintered at a relatively low temp. |
