SILICON ETCHING METHOD,申请号JP19800019304-传众专利搜索

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发明名称	SILICON ETCHING METHOD
摘要
申请公布号	JPS55119177(A)	申请公布日期	1980.09.12
申请号	JP19800019304	申请日期	1980.02.20
申请人	IBM	发明人	ROORENSU EDOMONDO FUOOGETSUTO;ROBAATO ANSONII GUDARA;JIYOSEFU KAATAA HORISU
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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