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发明名称
THERMOMIGRATION OF FINE LINES
摘要
申请公布号
GB2040180(A)
申请公布日期
1980.08.28
申请号
GB19790026413
申请日期
1979.07.30
申请人
GENERAL ELECTRIC CO
发明人
分类号
H01L21/28;C30B13/02;C30B13/06;H01L21/208;H01L21/24;(IPC1-7):C30B13/10
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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