| 摘要 |
<p>PURPOSE:To ease maintenance by a long-lived claw without adhesion of deposition which is a dust producing source in wafers and a claw contact part holding the wafers by fixing the two taper claws on a claw body so that a taper face is made an acute angle with a wafer holding face of the chuck body. CONSTITUTION:A chuck body 1 holding wafers 3, a means 4 for rotating the chuck body at the direction of a wafer face and a pushing-out pin 7 for pushingout the wafers 3 from the chuck body 1 are provided, the wafers 3 are carried in a horizontal position and treatment is performed in a vertical position. In regard to a wafer chuck, two taper claws 2 are fixed on the chuck body 1 so that a taper face is made an acute angle to a wafer holding face of the chuck body 1, and the wafers 3 are held between the taper face and the chuck body 1. Thus, deposition flying on the surface of the wafers 3 is accumulated at the outside of the taper claw 2. Therefore, dust does not generate when the wafers are attached and detached because deposition is accumulated on the inside taper part.</p> |
