JIG FOR HEAT TREATING WAFER,申请号JP19790016160-传众专利搜索

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发明名称	JIG FOR HEAT TREATING WAFER
摘要
申请公布号	JPS55110035(A)	申请公布日期	1980.08.25
申请号	JP19790016160	申请日期	1979.02.16
申请人	HITACHI LTD	发明人	TATEFURU NOBORU
分类号	H01L21/673;H01L21/205;H01L21/22;H01L21/31;H01L21/316	主分类号	H01L21/673
代理机构		代理人
主权项
地址

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