发明名称 PROCESS AND ATTACHMENT FOR ADJUSTING THE IMAGE SURFACE AND/OR THE OBJECT SURFACE IN OPTICAL COPYING UNIT
摘要 In a process and an attachment for adjusting the image surface and the object surface of a copying unit, at least one adjusting marking is alloted to the image surface or to the object surface of which the replica is within the conjugate surface. Then, the intensity profile of this replica is valued by generating a signal which depends on the contrast distinctness of the contours of the replica during one or a plurality of passages, with changes of intensity. This signal is used to correct the positions of the image and object surfaces in the direction of the optical axis.
申请公布号 WO8001721(A1) 申请公布日期 1980.08.21
申请号 WO1980AT00007 申请日期 1980.02.06
申请人 MAYER H 发明人 MAYER H
分类号 G03B41/00;G02B7/28;G03F7/207;G03F9/00;G03F9/02;H01L21/027;H01L21/30;(IPC1-7):03B41/00;05D3/04 主分类号 G03B41/00
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