ETCHING METHOD FOR METAL FILM,申请号JP19790015601-传众专利搜索

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发明名称	ETCHING METHOD FOR METAL FILM
摘要
申请公布号	JPS55107781(A)	申请公布日期	1980.08.19
申请号	JP19790015601	申请日期	1979.02.13
申请人	FUJITSU LTD	发明人	TABUCHI SHIYUUJI;ABIRU AKIRA
分类号	C23F4/00;C23F1/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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