| 摘要 |
PURPOSE:To obtain a homogeneous AlN sintered body for a semiconductor substrate having a stable surface state by holding an AlN molded body with a sintering jig made of a high purity AlN sintered body and by sintering the molded body. CONSTITUTION:High purity AlN powder contg. no sintering assistant is sintered by hot pressing to obtain a sintering jig. An AlN molded body is held with the jig and sintered to obtain an AlN sintered body for a semiconductor substrate, etc. Even when the jig is repeatedly used at high temp., the surface state of the jig undergoes a very slight change and the jig is hardly deformed. |
