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发明名称
摘要
申请公布号
JPS5525498(B2)
申请公布日期
1980.07.07
申请号
JP19760109227
申请日期
1976.09.10
申请人
发明人
分类号
H01L21/74;H01L21/331;H01L21/76;H01L29/73
主分类号
H01L21/74
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