发明名称 CISFET Processing including simultaneous implantation of spaced polycrystalline silicon regions and non-memory FET channel
摘要 A process for forming a CIS (conductor-insulator-semiconductor) integrated circuit having one or more non-memory field-effect transistors, and one or more polysilicon resistors and/or polysilicon conductors. A single mask and implant sequence is used to establish the threshold voltage of the field-effect transistor and the resistance (conductance) of the polysilicon components. The polysilicon components are formed to predetermined sizes, as needed, so that the threshold-determining implant provides the desired polysilicon resistance value(s).
申请公布号 US4210465(A) 申请公布日期 1980.07.01
申请号 US19780962422 申请日期 1978.11.20
申请人 NCR CORP 发明人 BROWER, RONALD W
分类号 H01L21/02;H01L21/033;H01L21/3215;H01L21/336;H01L21/768;H01L21/8234;H01L27/06;(IPC1-7):H01L7/34;B01J17/00;H01L11/00 主分类号 H01L21/02
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