DETECTING METHOD OF ELECTRON BEAM AXIS,申请号JP19780160627-传众专利搜索

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发明名称	DETECTING METHOD OF ELECTRON BEAM AXIS
摘要
申请公布号	JPS5586057(A)	申请公布日期	1980.06.28
申请号	JP19780160627	申请日期	1978.12.21
申请人	FUJITSU LTD	发明人	ITOU AKIO;OKABE MASAHIRO
分类号	H01J37/04;H01L21/027;H01L21/30	主分类号	H01J37/04
代理机构		代理人
主权项
地址

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