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发明名称
摘要
申请公布号
DE2507366(C3)
申请公布日期
1980.06.26
申请号
DE19752507366
申请日期
1975.02.20
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN
发明人
GRAUL, JUERGEN, DIPL.-ING. DR., 8022 GRUENWALD;MURRMANN, HELMUTH, DIPL.- PHYS. DR., 8012 OTTOBRUNN
分类号
H01L21/265;H01L21/331;H01L21/76;H01L21/8226;H01L27/082;H01L29/06;H01L29/08;H01L29/167;H01L29/73;(IPC1-7):H01L21/76
主分类号
H01L21/265
代理机构
代理人
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地址
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