| 摘要 |
<p>PURPOSE:To perform regulation of a gap precisely at a high speed, by a method wherein a plurality of bellows are provided on one side of a side part of a structural body of a main body, the structural body of a driving part, which is clamped to the bellows and lip part respectively at the upper and lower parts, is divided into a plurality of parts in a widthwise direction of the lip part and divided parts each and spaces each between divided parts are provided respectively with air supply holes to the bellows and grooves. CONSTITUTION:When compressed air is supplied to each bellows 2 through an air supply hole 10, force of a direction of an arrow x1 is generated between a structural body 1 of a main body and a structural body 3 of a driving part because mechanical rigidity of a shaft center direction of the bellows 2 is low as compared with that of the of the other structural body. The force of the x1 direction is transmitted to an elastic deformation part 11 as moment and the lip part 14 is moved in the direction x2. A quantity of the displacement is almost proportional to the moment to be transmitted form the bellows 2 or compressed gas pressure of a source of the moment. Openings of lips at a large number of points can be controlled simultaneously, independently, at a high speed and precisely as compressed gas pressure to be supplied to the bellows 2 is controlled simultaneously and independently in this manner.</p> |
