| 摘要 |
PURPOSE:To improve green luminescent efficacy largely, by revising combination of boat material and atmospheric gas, controlling impurities distribution at pn-joint, raising injection efficiency and increasing luminescent center concentration. CONSTITUTION:A GaP substrate 6 is placed on an indentation of a carbon boat 1, a solution 7 is poured into a carbon rectifier 3 lined with quartz, and then, it is placed on the boat and charged into a furnace. The furnace is filled with H2 gas, and after it reached a prescribed temperature, a solution 7 is made to contact the substrate 6, and then, it is cooled to grow an n-layer. At this time, donor is Si which was isolated as a result of reaction between quartz and H2. Now, when NH3 gas is supplied to Ar atmosphere, Si which is the donor reacts with NH3 to reduce the concentration and from a p-layer by residual acceptor C, and then, it is cooled, a p-layer is laminated and NH3 is stopped at a prescribed temperature for cooling to the room temperature. To thus prepared GaP substrate, a large quantity of N2 can be effectively introduced whereby it becomes possible to produce a green luminescent GaP element of excellent characteristics. |
